The Memslab is the Semco compact batch-type vertical PECVD furnace from ECM Lab Solutions. The Memslab is designed and built with high precision components, which allows for high quality thin film deposition. The applied Low Frequency Plasma feature permits the furnace to reach excellent passivation properties through a most advantageous horizontal thin substrate processing. This platform excels in the processing of small quantities of substrates; therefore, allowing the Memslab to meet requirements of universities, research laboratories, or small production facilities.
Up to 200mm (Round wafer) Up to 166*166mm (Square Wafer) Alternative graphite plates for smaller samples
Possibility of Robotization : an offer from ECM Robotics
Medical
Aerospace
Semi
Microelectronics
Optoelectronic
Fiber Optic
GaN
SiC
Metal
III-V
II-VI
Superconductors
Silicon
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