The rapid thermal deposition processes based on Chemical Vapor Deposition are named Rapid Thermal Chemical Vapor Deposition Processes (RTCVD).
ECM Lab Solutions offers Jetstar furnace for RTCVD application.
. In RTCVD, gases are injected and react with the surface of the fast heated substrate to form a thin layer.
. Reaction gases are introduced at controlled rate into an atmospheric or low-pressure environment.
. Several different gases may have to be supplied and programmed in various ratios to optimize these processes.