Jetfirst : bench-top RTP furnace

ECM Technologies’ JetFirst system is the most popular bench-top lamp furnace in the ECM Lab Solutions range. This RTP (rapid thermal processing) system is versatile, software controlled, and cost-effective. It consists of a compact and robust halogen lamp with a metallic water cooled reactor chamber to maintain an ultra-low memory effect. The user-friendly operating interface is clearly structured and ensures for a quick system start-up in just a few hours. The temperature measurement control system provides accurate and repeatable thermal control across the temperature range. The lamp array, upper flange, and quartz window are mounted in a rotating top lid giving full access to the chamber for easy loading and unloading of the wafer. Silicon carbide coated graphite susceptors are also available for the processing of various small samples and compound semi materials. A PID system provides accurate and repeatable thermal control across the temperature range, and running PIMS via a computer-dedicated supervisor enables recipe programming and monitoring of the entire RTP system. The high reliability and performance of the JetFirst adheres to small-scale production requirements, and the bench-top design allows for a quick and easy installation in lab facilities.