Jetlight : batch type RTP furnace

ECM Technologies’ JetLight is the entry-level, desktop controlled furnace for ECM Lab Solutions. It is a compact and yet robust, high speed heat treatment system with a wide range of material substrates for rapid thermal annealing (RTA). The furnace is equipped with a tubular quartz reaction chamber, and the lamp array, upper flange, and quartz window are mounted in a rotating top lid, which gives full access to the chamber for easy wafer loading and unloading. Silicon carbide coated graphite susceptors are available for various small sample and compound semi materials processing. A PID system also provides accurate and repeatable thermal control across the temperature range. The high reliability and performance characteristics allow for small-scale production. These make the JetLight system ideal for meeting the needs of universities and research centers looking for RTP systems in a multi-user environment.