Memslab

Batch type vertical Furnace

The Memslab is the Semco compact batch-type vertical PECVD furnace from ECM Lab Solutions. The Memslab is designed and built with high precision components, which allows for high quality thin film deposition. The applied Low Frequency Plasma feature permits the furnace to reach excellent passivation properties through a most advantageous horizontal thin substrate processing. This platform excels in the processing of small quantities of substrates; therefore, allowing the Memslab to meet requirements of universities, research laboratories, or small production facilities.

Effective dimensions

Up to 200mm (Round wafer)
Up to 166*166mm (Square Wafer)
Alternative graphite plates for smaller samples

Options

  • Modular and flexible design and tiny footprint
  • 1 to 4 independent or siamese process chamber
  • Configurable for 25/50 or 50/100

Integration

Possibility of Robotization

APPLICATION

PECVD
Dry Etching

INDUSTRY

Medical
Aerospace
Semi
Microelectronics
Optoelectronic
Fiber Optic

MATERIAL

GaN
SiC
Metal
III-V
II-VI
Superconductors
Silicon

Related products

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38029 Grenoble cedex 2 France
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OUR LOCATIONS

ECM USA Inc : USA
SEMCO INC USA : USA

ECM Technologies : Grenoble
ECM Greentech : Grenoble
CYBERSTAR : Grenoble
SEMCO Smartech : Castries
ECM Montpellier : Castelnau le Lez

ECM KAZAKHSTAN LLP : Kazakhstan

ECM Furnace INDIA Pvt. Ltd : India

ECM Greentech Middle East : Abu Dhabi UAE

ECM CHINA Co. Ltd : China
HEPAES ECM GROUPE : China (Joint-Venture)

SEMCO PTE. SINGAPORE : Singapore

ECM GmbH : Offenbach