Rapid Thermal Processing

Rapid Thermal Processing (RTP) is a semiconductor manufacturing process which provides a way to rapidly heat samples to high temperatures to perform short processes on a timescale of a few minutes maximum.

Highlights :

  • Fast heating and cooling to process temperatures up to 1400°C with ramp rates typically higher than 200°C/sec, combined with excellent gas ambient control, are within one processing recipe.
  • This system used to activate or dope the electronic layers by a very fast temperature raise up to 1200°C for proposed in complement of thin layers measurement systems.
  • Such rapid heating rates are performed by high intensity lamps (e.g. near-infrared light sources - Tungsten-halogen lamps) controlled by pyrometer and thermocouples that measure the sample temperature.

ECM Lab Solutions offers RTP furnaces for this application.

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