Annealsys’ AS-One RTP system is a versatile machine perfectly adapted to R&D for RTA and other rapid thermal deposition processes. It is available with two types of reactors to process substrates up to 100mm or 150mm and can perform annealing processes up to 1450°C in 100mm configuration.

In terms of control, pyrometer and temperature measurement via thermocouple come as standard. The digital PID controller is fast and provides accurate and repeatable control across the temperature range.

This system has been developed for labs, research centers and small scale production. It is perfectly adapted to clean room applications thanks to its reduced footprint and easy access for maintenance operations.