Jetstar

Standalone RTP Furnace

ECM Technologies’ Jetstar is the software-controlled standalone-type furnace in the ECM Lab solutions range. This RTP (rapid thermal processing) furnace is equipped with a manual loading/unloading system for the post-production stage, but can be easily upgraded with an automated cassette-to-cassette load lock, or a cluster introduction module for fast and easy manipulation in the fabrication area. The multi-zone control system provides highly accurate, reproducible thermal performance at any temperature for enhanced uniformity associated with pyrometer, thermocouple temperature sensors and the PID temperature controller. The Jetstar was developed to meet R&D unit requirements involved in the qualification and implementation of industrial processes for research-to-production applications.

Features

Temperature range

RT to 1250°C with ramp rate up to 200°C/s

Process

Atmospheric and high-vacuum (10-6 mbar)

Effective dimensions

Up to 300 mm diameter

Options

  • Cold-wall chamber, Designed for excellent process performance
  • MFC-controlled gas lines, For solid, liquid and gaseous precursors
  • Loadlock, And process chamber fully configurable

Integration

Possibility of Robotization and Compatibility with Automation

APPLICATION

Rapid thermal process (RTP)
RTA
RTO
RTN
Crystallization
Densification
Selenization
Carbonization
RTCVD processes

INDUSTRY

SEMI
Optoelectronic
Microelectronics
MEMS
PV

MATERIAL

Silicon
Steel
Glass
III-V
II-VI

 

Related products

Batch Type RTP Furnace
Tubular batch type furnace
Bench Top RTP Furnace
46 rue Vaujany – Technisud
38029 Grenoble cedex 2 France
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Standalone RTP furnace

Standalone RTP furnace with multi-zone control system

Standalone RTP furnace. The Jetstar system is perfectly adapted to qualify industrial processes & research to production applications