LIQUID PHASE EPITAXY (LPE)

The Cyberstar Liquid Phase Epitaxy Furnace from ECM Lab Solutions is a liquid phase epitaxy installation for II-VI crystals. It is mainly used for the deposition of device quality Cadmium Telluride, other II-VI binary and ternary compounds, or other III-V compounds.  The process involves the popular graphite boat slider technique. The furnace is optimized for high stability, low thermal inertia, and is able to homogeneously heat up the large graphite boat necessary for handling a 40 x 60 mm2 sample.

Features

Thermal

– Graphite (operation up to 3,000 °C)
Tungsten (operation up to 2,350 °C)
– Molybdenum (operation up to 1,600 °C)

Atmosphere management

Mass flow, Pressure regulation, Humidity, Dryer, Purifier

Cooling

– Forced convection Quenching: < 1.45 bar
– Speed variation

Supervision

Process piloting: Production tracking, Process data backup

Ergonomics

Loading platform, Handling tool

Effective dimensions

20 x 25 mm2 
36 x 38  mm2  40 x 60  mm2

Options

  • Standards AMS 2750, ATEX
  • Primary vacuum, Dry pump, Roots pump
  • Secondary vacuum configuration , Diffusion pump, Turbo pump, Cryogenic pump
  • Wet or Dry Hydrogen
  • Accelerated/ forced cooling
  • Gas panel : Nitrogen, Argon, Hydrogen…
  • Pressure regulation

Integration

Possibility of Robotization and Compatibility with Automation

APPLICATION

Annealing
Brazing
Sintering
Magnetic annealing
Glass-to-metal sealing

INDUSTRY

Additive manufacturing
Aeronautic
Automotive
Medical

MATERIAL

Semiconductors

Related products

Vacuum Heart Lift Furnace
46 rue Vaujany – Technisud
38029 Grenoble cedex 2 France
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Liquid Phase Epitaxy LPE

Liquid Phase Epitaxy LPE | ECM Lab Solutions

Liquid Phase Epitaxy LPE Cyberstar furnace graphite boat slider for deposition of II-VI and III-V materials. High stability and homogeneous heating