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LPE furnace

LIQUID PHASE EPITAXY (LPE)

The Liquid Phase Epitaxy (LPE) Furnace from ECM Lab Solutions is a liquid phase epitaxy installation for II-VI crystals. It is mainly used for the deposition of device quality Cadmium Telluride, other II-VI binary and ternary compounds, or other III-V compounds.  The process involves the popular graphite boat slider technique. The furnace is optimized for high stability, low thermal inertia, and is able to homogeneously heat up the large graphite boat necessary for handling a 40 x 60 mm2 sample.

Technical specifications

Thermal

  • Graphite (operation up to 3,000 °C)
  • Tungsten (operation up to 2,350 °C)
  • Molybdenum (operation up to 1,600 °C)

Atmosphere management

Mass flow, Pressure regulation, Humidity, Dryer, Purifier

Cooling

  • Forced convection Quenching: < 1.45 bar
  • Speed variation

Supervision

Process piloting: Production tracking, Process data backup

Robotic integration

Robotic integration : with ECM Robotics

Ergonomics

Loading platform, Handling tool

  • 20 x 25 mm2 
  • 36 x 38  mm2
  • 40 x 60  mm2
  • standards AMS 2750, ATEX
  • Primary vacuum, Dry pump, Roots pump
  • Secondary vacuum configuration, Diffusion pump, Turbo pump, Cryogenic pump
  • Wet or Dry Hydrogen
  • Accelerated / forced cooling
  • Gas panel : Nitrogen, Argon, Hydrogen…
  • Pressure regulation
  • Additive manufacturing
  • Aeronautic
  • Automotive
  • Medical
  • Semiconductors
All our Crystal Growth furnaces

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