The Semco Tubestar is the compact batch-type tubular furnace from ECM Lab Solutions. The key characteristics of this furnace line are: precise thermo-chemical treatments combined with industrial process control, integration modularity, and a user-friendly interface. Each populated chamber can be independently configured and operated in a large range of atmospheric, sub-atmospheric or low pressure processes. The Tubestar furnace can also handle multiple gases and liquid precursors with a temperature range from 200°C to 1300°C. Its modular design allows to meet a large range of clean thermal treatments for R&D and small production facilities.