TubeStar

Batch Type Horizontal Tube Furnace

The Semco Tubestar is the compact batch-type tubular furnace from ECM Lab Solutions. The key characteristics of this furnace line are: precise thermo-chemical treatments combined with industrial process control, integration modularity, and a user-friendly interface. Each populated chamber can be independently configured and operated in a large range of atmospheric, sub-atmospheric or low pressure processes. The Tubestar furnace can also handle multiple gases and liquid precursors with a temperature range from 200°C to 1300°C. Its modular design allows to meet a large range of clean thermal treatments for R&D and small production facilities.

Features

TubeStar range

– Modular and flexible & tiny footprint
– 
1 to 4 independent process chambers
– Configurable for 25/50 or 50/100 wafers per chamber

Manual or automatic boat loading

Temperature range

– up to 1100°c (1200°c upon request)

Minimized heat load around the system

Overall dimensions

(L*W*H) 1500*800*1500 mm

Teflon type, Oil type or Dry Pump

Compatible with 156X square substrate (PV)

Spike and profile thermocouple control

Loading platform, Handling tool

Multizone heating element

Atmospheric or vacuum process capability

Gas Cabinet for up to 13 gases

Liquid source precursor Cabinet and vaporisation

SEMCO Mycro process Management software

SUBSTRATE dimensions

100-200-300 MM

Options

  • Primary vacuum pump &  Secondary vacuum pump
  • Atmospheric configuration (reduced, low pressure or ultra-high vaccum)
  • Wet oxidation
  • By-product treatment systems
  • Turbomolecular pumping assembly
  • Water cooling unit

Integration

Possibility of Robotization and Compatibility with Automation

APPLICATION

Annealing
Sintering
Diffusion
LPCVD
Oxidation
Glass-to-metal sealing

INDUSTRY

Medical Aeronautic SEMI
Optoelectronic
Mcroelectronics Fiber Optic

MATERIAL

Ceramics
Glass
III-V
II-VI
Sapphiire
Superconductors
GaN
SiC
Metal
Quartz
Silicon

46 rue Vaujany – Technisud
38029 Grenoble cedex 2 France
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OUR LOCATIONS

ECM USA Inc : USA
SEMCO INC USA : USA

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ECM KAZAKHSTAN LLP : Kazakhstan

ECM Furnace INDIA Pvt. Ltd : India

ECM Greentech Middle East : Abu Dhabi UAE

ECM CHINA Co. Ltd : China
HEPAES ECM GROUPE : China (Joint-Venture)

SEMCO PTE. SINGAPORE : Singapore

ECM GmbH : Offenbach

Batch type tube furnace

Batch type tube furnace horizontal | ECM Lab Solutions

Batch type tube furnace – The tubestar furnace is a batch type tube hea treatment instllation for RTP and deposition processes. It is also a flexible furnaces adapted for a wide range of applications.