Jetstar : standalone RTP furnace

ECM Technologies‘ Jetstar is the software-controlled standalone-type furnace in the ECM Lab solutions range. This RTP (rapid thermal processing) furnace is equipped with a manual loading/unloading system for the post-production stage, but can be easily upgraded with an automated cassette-to-cassette load lock, or a cluster introduction module for fast and easy manipulation in the fabrication area. The multi-zone control system provides highly accurate, reproducible thermal performance at any temperature for enhanced uniformity associated with pyrometer, thermocouple temperature sensors and the PID temperature controller. The Jetstar was developed to meet R&D unit requirements involved in the qualification and implementation of industrial processes for research-to-production applications.