Diffusion furnace
Tubestar furnace, for diffusion process.
Tubestar
Batch type horizontal
furnace
A Batch Type Tube furnace for RTP and
deposition processes.
What is diffusion in wafer process ?
Diffusion is a high-temperature process typically used to electrically activate impurities introduced by ion implantation and also drive dopants deeper into a film layer.
Reduced pressure operating conditions in the tubes prevent over-saturation of the doping sources, and results in a more homogeneous flow distribution, which saves process gas and produces better quality electronic devices.
Performing diffusion in a batch reactor enables to accurately control temperature and ambient conditions, simultaneously, for a large number of wafers, thus increasing productivity.
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