VERTICAL 3 ZONE LIQUID PHASE EPITAXY (VLPE)

The Cyberstar Liquid Phase Epitaxy Furnace from ECM Lab Solutions is based on controlled power distribution technology. The system has a translation unit to hold and dip the seed wafer into the melt, and the crucible is equipped with ACRT rotating mechanism. Each thermal zone in the furnace is equipped with several sub-heaters controlled independently to obtain the perfect homogeneous thermal distribution and a very low required thermal gradient. Integrated software is provided to control and monitor the thermal profile in the furnace by a direct experimental measurement solution. The growth process (including the heating power, translation movement and rotation of the crucible) is fully configurable by the software and can be automatically operated using the Automatic Sequence Mode. The specific design of the furnace makes it ideal for laboratory use, universities, and R&D centers.

Features

Control of current distribution between the direffrent heating rings

Crucible ACRT rotation fully automatic

Resistive heating

Operating security loop system

Water and air cooled

Working temperature in the reactor up to 1200 °C

Fully computerized heating and translation process

Fully integrated vertical temperature profiler to test and regulate to unifrorm temperature in the reactor zone

Effective dimensions

Up to Ø 150 mm

Integration

Possibility of automation

APPLICATION

Crystal Growth

INDUSTRY

Medical Imagery
Sensors
Telecomunications
Defense

MATERIAL

III – V
II – VI
Cadmium Telluride (Cd Te)

46 rue Vaujany – Technisud
38029 Grenoble cedex 2 France
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Liquid Phase Epitaxy

Liquid Phase Epitaxy furnace | ECM Lab Solutions

Liquid Phase Epitaxy Cyberstar Vertical with independant heating zone for homogeneous and lowh thermal gradient deposition of II-VI and III-V materials