TubeStar : batch type horizontal furnace

A batch type tube furnace for RTP and deposition processes

The Semco Tubestar is the compact batch-type tubular furnace from ECM Lab Solutions. The key characteristics of this furnace line are: precise thermo-chemical treatments combined with industrial process control, integration modularity, and a user-friendly interface. Each populated chamber can be independently configured and operated in a large range of atmospheric, sub-atmospheric or low pressure processes. The Tubestar furnace can also handle multiple gases and liquid precursors with a temperature range from 200°C to 1300°C. Its modular design allows to meet a large range of clean thermal treatments for R&D and small production facilities.

Technical specifications

Features

  • Modular and flexible & tiny footprint
  • 1 to 4 independent process chambers
  • Configurable for 25/50 or 50/100 wafers per chamber
  • Manual or automatic boat loading
  • Minimize heat load around the system
  • Teflon type, Oil type or Dry pump
  • Compatible with 156X square substrate (PV)
  • Multi-zone heating element
  • Atmospheric or vacuum process capability
  • Gas Cabinet for up to 13 gases
  • Liquid source precursor Cabinet and vaporisation
  • SEMCO Mycro process Management software

Temperature range

Up to 1100°C (1200°C upon request)

Overall dimensions

(L*W*H) 1500*800*1500 mm

Spike and profile thermocouple control

Loading platform, Handling tool

100-200-300 MM

  • Primary vacuum pump & Secondary vacuum pump
  • Atmospheric configuration (reduced, low pressure or ultra-high vacuum)
  • Wet oxidation
  • By-product treatment systems
  • Turbomolecular pumping assembly 
  • Water cooling unit
  • Medical
  • Aeronautic
  • Semiconductor
  • Optoelectronic
  • Microelectronics
  • Fiber optic
  • Ceramics
  • Glass
  • III-V
  • II-VI
  • Sapphire
  • Superconductors
  • GaN
  • SiC
  • Meta
  • Quartz
  • Silicon

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