Features
TubeStar range
– Modular and flexible & tiny footprint
– 1 to 4 independent process chambers
– Configurable for 25/50 or 50/100 wafers per chamber
Manual or automatic boat loading
Temperature range
– up to 1100°c (1200°c upon request)
Minimized heat load around the system
Overall dimensions
(L*W*H) 1500*800*1500 mm
Teflon type, Oil type or Dry Pump
Compatible with 156X square substrate (PV)
Spike and profile thermocouple control
Loading platform, Handling tool
Multizone heating element
Atmospheric or vacuum process capability
Gas Cabinet for up to 13 gases
Liquid source precursor Cabinet and vaporisation
SEMCO Mycro process Management software
SUBSTRATE dimensions
100-200-300 MM
Options
- Primary vacuum pump & Secondary vacuum pump
- Atmospheric configuration (reduced, low pressure or ultra-high vaccum)
- Wet oxidation
- By-product treatment systems
- Turbomolecular pumping assembly
- Water cooling unit
Robotic Integration
Possibility of Robotization and Compatibility with Automation : an offer from ECM Robotics
