Rapid Thermal Processing Equipment

Our Rapid thermal processing equipment

jetlight equipment

Jetlight

Batch type RTP
furnace

RTP furnace for laboratory and R&D applications.

Jetfirst rtp equipment

Jetfirst

Bench top RTP
furnace

RTP furnace for laboratory and production.

Jetstar rtp equipment

Jetstar

Standalone RTP
furnace

Standalone RTP furnace with multi-zone control system.

as-micro rtp equipment

AS-Micro

Economical RTP
furnace

RTA system for universities and R&D applications.

as-one rtp equipment

AS-One

Versatile RTP
furnace

RTA system for R&D and small scale production.

as-premium rtp equipment

AS-Premium

Rapid Thermal Processing System

Processing of silicon and compound wafers.

What is a rapid thermal processing furnace ?

Rapid Thermal Processing (RTP) consists in using lamp furnaces for rapid heat treatments on silicon wafers.

RTP is a semiconductor manufacturing process which provides a way to rapidly heat samples to high temperatures to perform short processes on a timescale of a few minutes maximum. 

Fast heating and cooling to process temperatures up to 1400°C with ramp rates typically higher than 200°C/sec, combined with excellent gas ambient control, are within one processing recipe.

This system used to activate or dope the electronic layers by a very fast temperature raise up to 1200°C for proposed in complement of thin layers measurement systems.

Such rapid heating rates are performed by high intensity lamps (e.g. near-infrared light sources – Tungsten-halogen lamps) controlled by pyrometer and thermocouples that measure the sample temperature.

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