CSS Furnace : Copie Space Sublimation system

Compact single-wafer system for Close Space Sublimation and thin film deposition processes. Designed for both R&D and industrial environments.

The Copie Space Sublimation system is a compact, single‑wafer solution engineered for Close Space Sublimation (CSS) and thin‑film deposition. Suitable for both R&D labs and industrial settings, it provides exceptional versatility, accepting a wide variety of powders or pellets for numerous coating needs. Its sophisticated reactor design—paired with secondary vacuum functionality—delivers ultra‑clean processing environments and high repeatability.

The unit combines high‑output lamp heating with an efficient cooling system, allowing fast heating/cooling cycles and achieving thermal gradients of up to 450 °C. Accurate temperature regulation makes process optimization straightforward, ensuring reliable and reproducible results for thin‑film applications.

Technical specifications

Equipment capabilities

Up to 210mm square wafers

Up to 8’’ Semiconductor round wafers

Flexible source material loading (powder, pellet, …)

Machine design

Easy maintenance system

Modular, Flexible & Compact footprint

CE Certification

Industry 4.0 compliant (supervision & robotization on demand)

Reactor design

Excellent process precision and repeatability

Ultra clean process conditions

9 heating zones

Internal PID temperature control

Embedded cooling system

Process flexibility

Vacuum & secondary vacuum capabilities (< 10-6mbar)

Fast heating and cooling

High temperature gradient (> 450°C)

Multizone lamp furnace ( 50°C < R < 700°C)

Round : 4’’ – 6’’ – 8’’
Square : 182mm – 210mm

Copie-Space Sublimation (CSS)

Thin film deposition

Rapid Thermal Processing

  • Medical
  • Microelectronics
  • Photovoltaics
  • Optoelectronics
  • Sensors
  • Aeronautics
  • Silicon
  • SiC
  • GaN
  • Sapphire
  • Quartz
  • Glass
  • Metal
  • III-V
  • III-VI
  • Superconductors

Do you have a question or a project ?

Would you like more information, to entrust us with a project or meet our teams ? Fill in our form and our teams will get back to you as soon as possible!