MICROELECTRONIC
Furnaces for semiconductor and solar applications: CVD, PECVD, diffusion etc.
OUR FURNACES
Batch type RTP furnace
Jetlight
Bench-top RTP furnace
Jetfirst
Standalone RTP furnace
Jetstar
Batch type horizontal tube furnace
Tubestar
RTA & CVD processes
As-one
RTA System
As-premium
Economical RTA system
As-micro
Batch type vertical furnace
Memslab
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