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MICROELECTRONIC

Furnaces for semiconductor and solar applications: CVD, PECVD, diffusion etc.

OUR FURNACES

Batch type RTP furnace

Jetlight

Bench-top RTP furnace

Jetfirst

Standalone RTP furnace

Jetstar

Batch type horizontal tube furnace

Tubestar

RTA & CVD processes

As-one

RTA System

As-premium

Economical RTA system

As-micro

Batch type vertical furnace

Memslab